Dear Colleagues
I am working on Multiferroics. In the course of my research, I have to etch SrTiO3 entirely (not only TiO2 terminated surface) during the process to fabricate hall bars. Most of the literatures I have gone through so far have not regarded SrTiO3 as principal layer, but as substrate. Can anyone please help me, based on their experience, how can I effectively etch SrTiO3 after lithography?
Thanks a lot
Abu Naushad Parvez
Dear Abu Naushad Parvez ;
You can etch it with buffered HF (BHF) or 3:1 HCl-HNO3 acidic solution, as detailed in the following reference;
Article Depth-Resolved Subsurface Defects in Chemically Etched SrTiO3
Dear Abu Naushad Parvez,
this article may be useful for you
Article Dynamics of SrTiO3 surface during wet etching and high-tempe...
Dear Abu Naushad Parvez
You can etch titanate perovskites with a mixture of fairly concentrated hydrogen peroxide and a strong stable complexing agent such as EDTA or CDTA (as their dipotassium or disodium salts). This is especially useful if other materials present are sensitive to HF.
See published patent application KR19990082725, Cooper, Emanuel Israel; Duncombe, Peter Richard; Leibowitz, Robert Benjamin; Rosenberg, Robert, “Peroxide etchant process for perovskite-type oxides”, KR19990082725(A), 19991125. Formulation 1 is plain 5M H2O2; formulation 2 is same but with added 0.1M of K2H2EDTA. (I have no details for the 3rd, "CMP" formulation and whether actual CMP was performed.) If you care about bath life you may want to chose CDTA or EDTMP instead of EDTA. I'm attaching an excerpt from the example section.
what is chemical Etchant STO (100) for fabrication Step edge junction?
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