The lab I work in has an Oxford EDS detector with a Carl Zeiss Gemini. Lately, I have been sensing that the data is too off. Do EDS detectors have to be calibrated, and if how can we do it?
You have to calibrate detector as described by An-Giang Nguyen periodically, it is important for both qualitative and quantitative analysis. For reliable results in quantitative analysis you have to use special standards and be aware about limitations of EDS analysis, described here:
Article Is Scanning Electron Microscopy/Energy Dispersive X-ray Spec...