Can wire bonds short the pads and underlying conductor layers?

17 December 2022 1 7K Report

I'd like to wire bond to a 100 nm Au layer, but I think I am penetrating the underlying dielectric and shorting the underlying gold layer.

Layer stack:

100 nm Au (pad)
300 nm SiO2
100 nm Au
Thermal oxide substrate

Is it possible to achieve ball- or wedge- bonding without damage to the film stack? I have only tried using wedge-bonding.

David Rasmussen

That should be possible with wedge bonding.

if using gold wire then use a non-cross groove tool to minimize the ultrasonic power being focused too specifically.

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