We have developed a torsional micro-gyroscope using UV-LIGA process. The device has been tested for resonator characteristics using LDV. However, at present, we do not have rate table characterization facility (both the equipment and sensing circuit) with us. Can someone help us to get this characterization done?
Sir, we have this facility at two axis in MNCF- CeNSE, IISC . You can Contact.
@Ankush Jain: We designed and have got our fabricated Gyroscope (Outsourcing). However, we have no idea how to characterize the gyroscope like Resonant frequency, Q factor and sensitivities. I will be very thankful if you guide us the method or share some literature/notes about this? Can we use LDV? Please reply
@Nadeem Qaiser: The gyroscope can be characterize for resonant frequency and Q factor using Polytec MSA-500 Micro System Analyzer. It has LDV for measuring out-of-plane frequency response and stroboscopy for extracting in-plane frequency response. To find the sensitivity, you will need a capacitive ROIC like MS3110 hybrid integrated to the gyroscope. You will require a rate-table to apply the angular-rate. Please feel free to ask if you have any query.
We have a lab in Trondheim with the MEMSMap 510 XYZ for full 3D vibratio analysis om MEMS.
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