You can try with this link to download mems pro s/w...

http://softadvice.informer.com/Mems_Pro_Software_Free_Downloads.html

Try this also...

http://mems-pro.software.informer.com/download/

Even this also may help you...all these are different versions.

http://mems-pro.software.informer.com/4.0/

i didn't use it to simulate MEMS devices but i would be keen to use it.

Thank you Vishal Vasistha

But the links don't work!

You can purchase licensed version from this link-

http://www.europractice.stfc.ac.uk/software/softmems.html

It is another website for purchasing licensed version of memspro

http://softmems.com/saleoffices.html

you can solve your problem by using MEMSolver also that you can download from this link

http://www.memsolver.com/pages/evaluate.html

Dear Vishal Vasistha

Thanks very much

For MEMS design you use intellisuite or coventorware or ansysmultiphyscis

Comsol does the problem it solve multyphysics problems has a lot of examples easy to use has integtation with matlab

Thanks Alexander

I have comsol but i didn't try it until now

does it have a mems toolbox to build mems devices easily such as mems gyroscope?

There is mems module it concern electristatic, air damping and others

if you have deal with gyro you will need to solve coupled problem - electrostatic and mechanical. The Comsol will give opportunity to solve this problem

Dear Alexander Sabakin

Thanks very much