Can anyone help me to design MEMS devices fabrication mask layout using Intelli mask tool?

14 July 2017 1 9K Report

i have designed MEMS devices in ansoft hfss and analyzed mechanical characteristics using intellisuite software. now i have to design mask layout for fabrication of MEMS device using Intelli mask tool.

Anitha Gopalan

Thank you Mehmet Ozdogan ...

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