This broad question can be answered with a general search on the subject "how to interpret edx". I get an extensive list of links, many that point to the same question be asked over and over again on ResearchGate. The question can also be answered by consulting with an expert on EDX in your local area. Since you are new to this field, I imagine the instrument that you will use must have an operator who should be albe to advise you as well. To end with a summary of what you will learn:
* You will obtain elemental composition of the sample to a nominal depth of 1 micron.
* You will generally only see elements above C.
* You will generally only be able to analyze conductive samples.
I encourage you (with some polite admonishment as well) to take time to do the required background readings from this point.
Energy-dispersive X-ray spectroscopy (EDS, EDX, EDXS or XEDS), also called Energy dispersive X-ray analysis (EDXA) or Energy dispersive X-ray microanalysis (EDXMA), is an analytical technique used for the elemental analysis or chemical characterization of a sample.
Interpretation of EDX with Example is given below :
Weight% = 100 * weight of one component (element) / weight of entire sample.
Atomic% = 100 * number of atoms of one component / total number of all atoms in sample
Atomic weight% is calculated from the Element Weight% by dividing each element weight% by its atomic weight, do this for all elements in the sample which will give a list of Atomic Proportions. Sum of these together to obtain a Total Atomic weight. Then, for each Element in the sample divide its Atomic Proportion by the Total and then multiply it by 100.
EDX of CdS is explained below:
1. Cd: 79.15 wt%
2. S: 20.85 wt%
Divide each by their Atomic weights Cd (112.411) and S (32.065)
1. Cd: 79.15 / 112.411 = 0.704
2. S: 20.85 / 32.065 = 0.650
Sum
1. Cd: 0.704
2. S: + 0.650
1.354
Divide each by the Sum (1.354) and turn into Atomic%
1. Cd: 0.704 / 1.354 * 100 = 51.99 at.%
2. S: 0.650 / 1.354 * 100 = 48.01 at.%
The Average Atomic% of Cd:S was found to be almost stoichiometric in nature with the Cd% of 52 and S% of 48.
No need to worry much about analysing the EDX data, generally all the SEM (in which EDX is attached) have software to automatically detect the elements present (by comparing the x-ray energy obtained with the standard reference values). If at all software miss something or not working, you can match the energy values with references manually.
Generally you will not get the elements below at. no. 6 because of very small x-ray energy produced by them.