I have a structure containing a post-baked SU-8 on Si substrate contaminated with cured PDMS residuals that I need to get rid of, can you suggest a way to clean it without harming SU-8 structures?
Plan A: Leave it soaking in isopropanol (SU-8 is insoluble in it) and it might swell the PDMS, so it'd be easier to remove. Unfortunately, I wouldn't be too optimistic about saving the silicon master.
Of course IPA or ethanol should be the last washing step, but maybe you should try a preliminary detergent step (using SDS 1% in milliQ water). I would also do what Theo Aspert mentioned first with tape if there are some solid pieces remaining