@Yekaterina_Lyubarskaya

Yekaterina Lyubarskaya

2 Questions 9 Answers 0 Followers

Questions related from Yekaterina Lyubarskaya

What are some recipes for RIE of Titanium using gases SF6, O2, Ar, and/or Freon?

I need to etch 400nm of Ti masked by positive photoresist (Shipley 1813) without touching the resist.

06 June 2012 9,299 11 View

What are some of the HF free etchants that can be used to etch titanium?

I am etching 400nm of Ti on top of Si in the presence of Au and Ni.

06 June 2012 3,405 3 View

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