How to control the pin holes in Silicon Nitride after HF dip for removing 15nm from 100nm SiN film?

On N-Type silicon wafer, i am depositing Phosphorous silicate glass of thickness 28-32nm and then depositing Silicon nitride layer of 105nm. Later i need to etch SiN layer by 20nm in HF solution...

20 October 2018 8,042 3 View