How can we reduce the porosity of tungsten oxide (WO3) thin films during DC sputtering deposition (target: W, power: 100 W, 75 W, and 50 W)?

We are fabricating a tandem structure where a ~50 nm thick WO3 film is deposited between two metal films using DC sputtering. We use a mixture of Ar and O2 gases at different flow rates while...

02 July 2024 2,518 2 View