Is it possible to do RF sputtering in a vacuum chamber having only rotary pump? If possible, how good the thin film could be?

I want to deposit metal oxides like Al2O3 and ZrO2 using rf sputtering. I can't afford expensive vacuum pumps like oil diffusion pump and turbo molecular pump to my sputtering vacuum chamber. I...

09 September 2016 1,499 7 View