What can be a potential reason for crack in the sample after dry etching SiO2 using CHF3?

I did SiO2 dry etching using CHF3 (100 W RIE power, 10 mT pressure, 20 sccm CHF3 flow) at 20C. After the etch process, I noticed cracks/peeling off in multiple places of my sample (image...

19 July 2023 7,663 3 View