What is recipe of patterning mask using PMMA over SOI? Can anyone share some research article to etch Si using RIE?

I have 250 nm (top silicon over oxide) thick SOI. I want to create slot of 200 nm width and 250 nm height. What is recipe of patterning mask using EBL over the SOI? Will it be better to use PMMA...

27 August 2018 4,377 2 View