Sandeep Kumar Chaluvadi

3 Questions 5 Answers 0 Followers

Questions related from Sandeep Kumar Chaluvadi

Silicon etching rate between polished and un-polished substrate surface by RIE ?

We are trying to etch unpolished silicon surface (back side) using SF6 plasma by Reactive Ion Etching (RIE) technique. we observed that the etching rate falls one order in magnitude on unpolished...

03 March 2017 9,309 3 View

How to avoid sidewall polymerization on SiO2 Buried Oxide layer in SOI substrates by using Dry etching (RIE) ?

I'm trying to etch SiO2 Buried oxide layer Isotropically using RIE with CHF3 + Oxygen plasma. I have problems to etch underneath of top silicon (Device layer) and i think it is due to...

11 November 2016 1,442 4 View

Half-order Bragg reflections in epitaxial thin films?

What are half-order bragg reflections and how can one observe them in epitaxial (00l) thin films? and, how are these half order bragg peaks are correlated to octahedral rotations in perovskites?

01 January 2016 4,133 5 View