Is it possible to prepare an amorphous thin film with smooth surface, without any nanograins, by RF magnetron sputtering?

If so then how to do it? The target material is known to have not bad glass forming ability (could prepare a rod 1 mm). The substrate is Si or SiO2 wafers. Here unwanted nanograins are amorphous...

02 February 2014 3,568 15 View