Is RBS sufficient to determine the nitrogen and titanium composition as well as oxygen contamination of a TiN thin film?

I have TiN, NbN, and AlN thin film samples, all of which are grown via MBE on silicon substrates, have a 5-10% oxygen contamination, and are about 50nm thick. Is RBS sufficient to determine the...

12 June 2018 9,064 11 View