Lift off problem with Indium/Gold deposition?

Hi, I'm doing 5/40nm In/Au e-beam evaporation at rates 0.2A/s(for In),1A/s(Au) on lithographically(doubly coated 495k,950k PMMA e-beam resist) done Si substrate at base pressure 2e-6torr. I'm...

19 January 2021 7,782 4 View