Is it possible for O/Al ratio to be as high as 2.5 in RF reactively sputtered alumina films?

the O/Al ratio in stoichiometric alumina film should be 1.5 but in most cases off stoichiometry is obtained. What then happens to the excess O in the film in cases of O/Al greater than 1.5. What...

05 December 2014 5,437 4 View