Olga Mihailichenco

4 Questions 3 Answers 0 Followers

Questions related from Olga Mihailichenco

How to fix AZ9260 photoresist thickness drift down?

Hi! I am creating the recipes for our spin coater and also monitoring the thickness of the resist over 1 year already. Target thickness is 4.7um and the control window is +/-50nm. This resist is...

24 April 2019 653 4 View

How to fix AZ9260 photoresist thickness drift down?

Hi! I am creating the recipes for our spin coater and also monitoring the thickness of the resist over 1 year already. Target thickness is 4.7um and the control window is +/-50nm. This resist is...

04 April 2019 1,475 4 View

Photoresist ageing in conventional (novolac) resists?

Hi All, 1) Do you know how long a coated wafer can be kept (in a closed box) without exposure considering humidity variations of the cleanroom? After how long it should be reworked? 2) How long...

01 January 1970 1,258 1 View

Photoresist ageing in conventional (novolac) resists?

Hi All, 1) Do you know how long a coated wafer can be kept (in a closed box) without exposure considering humidity variations of the cleanroom? After how long it should be reworked? 2) How long...

01 January 1970 4,062 1 View