Any suggestion on post aluminum metal etch cleaning especially for submicron metal patterns on PECVD oxide layer?

Hi all, Do you have any strategy to clean the aluminum etch residues on PECVD oxide layer? There is also a ARC TiN layer on Al. The etch gases are Cl2 and HBr. O2 plasma is applied right after...

10 September 2015 7,699 2 View