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What are the techniques to detect micro cracks in Si wafers. Preferably for a bunch of wafers together. I know EL/PL is one technique but it is for individual wafer not a bunch of wafers together.
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I have a vacuum chamber and I want to measure the temperature inside. I have KF-50 flange glass viewing port but glass absorbs IR and IR thermometer does not works through glass. Can anyone...
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