Matthew Mcdonald

3 Questions 3 Answers 0 Followers

Questions related from Matthew Mcdonald

Deflection of MEMS cantileveler proportional to L^?

Hello, I am fabricating a neural probe, which is essentially a MEMS cantilever. Tip deflection is important for me, so I am curious as to the relation between thin film stress and and tip...

22 November 2022 715 2 View

Cause of blisters in ALD layer at the edge of electrode?

I've encountered a defect during processing that I can't figure out, so I'm hoping I might find some ideas here. My mask design is a microelectrode array, with 60 microelectrodes with diameter...

20 January 2021 814 1 View

How can I perform isotropic SiO2 etch with CF4 plasma?

I am trying to get the structures obtained in the figure I attached. Basically I need an isotropic plqsmq etch of SiO2 with CF4. Ive only been able to obtain quite vertical sidewalls so far for...

05 May 2015 8,280 6 View