How can I detect arching during oxide deposition from SiH4 HDPCVD?

I'm working on HDPCVD SiH4/O2 based tool to depose Silane Oxyde materials. How can I detect arching occurrences? By a Langmuir probe? If detection is not possible, how do you suggest to avoid...

31 October 2014 9,519 3 View