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Questions related from Masoud Jedari Ghourichaei
Hello, I would like to find the first mode out of plane resonant frequency (it is in the order of around 7 MHz according to comsol simulation) of a released plate (10um by 10um) using laser...
27 March 2022 9,053 1 View
We would like to use Polytech microsystem analyzer (MSA) to characterize the resonance frequency of a fabricated cantilever and compare them with FE. However, the stage of the MSA is passive and...
05 January 2022 742 1 View
Hello, I am working on a mems chip. it is a released cantilever. the cantilever was on oxide and oxide has been etched by wet HF. however, we would like to fill beneath the cantilever with oxide....
01 December 2021 2,969 9 View