Madeleine Nilsen

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Questions related from Madeleine Nilsen

Suggestions for wet etch of aluminum oxide, with selectivity to Si3N4 and Si?

Hi I would like to remove a metal mask of 300 nm Al on top of 10 nm Ti by wet etching. The requirement is that LPCVD-silicon nitride and silicon should not be etched by a significant degree Do...

21 November 2018 9,759 3 View

How to remove gold from an AFM cantilever?

I have commercial AFM cantilevers with a 70nm backside gold coating (and probably a thin Ti or Cr adhesion layer) which I need to remove. What would be a gentle way to do so? Aqua regia will of...

18 October 2017 8,898 1 View