Khalid Abdellaoui

2 Questions 6 Answers 0 Followers

Questions related from Khalid Abdellaoui

Did anyone have experience in etching of Al2O3 with SF6/O2 and the resulting reactions ?

Hello everybody, I have an RIE system. I want to etch Al2O3 with SF6 and O2. regardless of the parameter setting, I would like to know which chemical reactions occur when etching Al2O3 with...

07 June 2021 9,010 6 View

RIE of Al2O3 with SF6 ?

Hello everybody, I would like to know, if it is possible to etch Al2O3 with RIE with SF6 ? can you also achieve higher etching rates with SF6 ? or do i have to use another gas to achieve higher...

25 February 2021 8,549 5 View