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Questions related from Julija Pervenecka
Have somebody try to use conductive top coat Electra 92 on negative tone photoresist SU8 for e-beam lithography and know how good or bad it works on SU8?
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Is there any metal (except noble metals) that I can evaporate at low temperature and then easily remove with oxygen plasma? And will it damage under-layer of the polymer (such as PMMA, PSU or PVK)?
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