John Patrick Dodson

3 Questions 6 Answers 0 Followers

Questions related from John Patrick Dodson

Best lift-off solvent to use for high yield e-beam lithography (PMMA bilayer)?

I am working on an e-beam process that defines metal gates with extremely high sensitivity to the repeatability/resolution of the defined geometry. I am looking to improve our recipe since we...

23 August 2017 944 4 View

How can I achieve more reliable liftoff for PMMA bilayer process?

I've been using an e-beam litho recipe from my group for a while, and generally it works pretty well, however I often struggle to get clean liftoff, especially when processing aluminum...

08 April 2017 1,265 11 View

Can you wire bond through thin dielectrics and achieve consistent electrical contact?

I'm working on a complicated fabrication project, and it just so happens that if I was able to wire bond through a thin dielectric of approximately 40nm, it would make this fab considerably less...

19 January 2017 225 6 View