Can anyone suggest literature (or experimental) data about the production of the negative TiN ion in a sputtering ion source by using Ti as cathode?

In the Middleton negative ion cookbook it is reported that they could extract up to 4-6 uA of TiN ions by sputtering of titanium nitrides cathodes. I would appreciate if someone can give more...

26 April 2014 4,978 2 View