The Ti-Al-Ta-N coating deposited by R-HiPIMS contains oxygen at a duty cycle of less than 10%?

The Ti-Al-Ta-N coating was applied using the R-HiPIMS method (bias voltage -80V, substrate temperature 425 °C, power 1 kW). In a frequency range of 1-10 kHz, there is no oxygen in the coatings...

22 December 2023 2,310 1 View