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EUV lithography has been researched extensively, but several big issues remain unresolved. In the mean time, Intel has pushed DUV lithography down to 22 nm structures. I am now in doubt if EUV...
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The charges in the structural formula of BF3 + NH3 on Wikipedia < http://commons.wikimedia.org/wiki/File:NH3-BF3-adduct-bond-lengthening-2D.png > look strange to me. I've asked on the discussion...
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