D. Talukdar

2 Questions 2 Answers 0 Followers

Questions related from D. Talukdar

Can we do an ALD deposition of HfO2 over lithographically patterned SiO2 at low temperature at which PMMA is baked i.e., 180 Deg C?

The temperature I am looking for is maybe 150 Deg C for HfO2 deposition.

13 August 2014 7,774 1 View

What is a suitable boat to evaporate Niobium?

What is the preferred evaporation technique to evaporate Niobium usually? My tungsten boat broke during evaporation and chamber vacuum fell by 2 orders though I could get some material.

10 May 2014 4,764 3 View