High leakage on HfO2 thin film (MIM structure) at low voltage?

I made a capacitor device: 150nm Au/ 50nm Cr/ 50nm HfO2/ 45nm Au/ 5nm Cr/SiO2, where the 150nm Au/ 50nm Cr are top electrodes and 45nm Au itself is the bottom electrode, to test how good the HfO2...

01 January 2017 9,131 3 View