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Questions related from Christopher Ren
I've already attempted using a normal plasma cleaner for up to 30 minutes. It seems much of the sample is still covered in Carbon.
03 March 2015 311 2 View
Standard method includes PEC, but that seems to leave things such as whiskers on microdisk occasionally, and the surface can also be quite rough, does anyone know of a better way to perform an etch?
02 February 2014 8,327 5 View
