Etching 50nm in diamter hole on 20nm SiO2 using Ebeam litography and RIE?

Hello, I am currently working on etching a 50nm diameter hole on 20nm SiO2. The ebeam exposure is done using 100nm of PMMA A2 as ebeam resist. What would be the etching time of the SiO2 in the...

29 January 2023 8,587 2 View