Arash Dehzangi

2 Questions 7 Answers 0 Followers

Questions related from Arash Dehzangi

In KOH etching on SOI, for the mask prepared by AFM- LAO (oxide thickness < 8nm), what is the relation of the oxide thickness and etching quality?

For example how can we control over etching or high undercutting? LAO (Local Anodic Oxidation)

10 April 2013 5,640 5 View

Is there any way to control the angle of etched area in anisotropic KOH Si etching process?

During the anisotropic Si etching, the angle between the etched area and un-etched area has significant impact on characteristic for nanodevice fabrication using KOH wet etching process. What...

29 October 2012 4,444 5 View