How can I utilise bilayer PMMA effectively for 100 nm metal lift-off of 1 micron features?

I wish to use deep-UV lithography to pattern my sample with 1 micron wide and 1 micron spaced inter digitated contacts (100 nm thickness Ni/Au as the metal stack). Since deep- UV (193 nm)...

07 October 2017 2,399 1 View