Andrei Costina

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Questions related from Andrei Costina

Problems with anodization of tantalum with a copper layer underneath tantalum?

Dear fellow researchers, I am currently trying to build thin film tantalum pentoxide integrated capacitors. I use 8''/200mm silicon wafers with a 100nm thick silicon oxide layer. I sputtered...

26 February 2024 8,158 1 View

How does an one µm thick copper layer react in a pure SF6 plasma?

For my tantalum pentoxide thin film integrated capacitors, I need to etch the tantalum and tantalum pentoxide layers with pure SF6 plasma. While etching these layers copper will also be exposed to...

25 January 2024 618 1 View