Is the non stability of voltage of autopolarisation (target 8YSZ) reccurent in non-reactive(pure Ar) RF magnetron spputering process?

I did a lot of sputter and i noticed that Vbias wasn't stable occuring the deposit (decreasing) at differente pressure 10-20-30 x 10-3 mbar and RF power 60 W I will appreciate explanation and...

08 August 2023 9,216 4 View