What is the origin of the dots that appear in the SEM pictures of InP or InGaAsP layers after an FIB cut?

I am doing some FIB cuts and analyzing my layer stack. I always see dots in the InP and InGaAsP layers, but I don't know their origin. These dots do not appear when I do a SEM of a cleaved sample,...

28 February 2018 1,247 2 View