Bizarre defects in Si etched in a deep reactive-ion etching (DRIE) process (Bosch), so what happened? Physical explanation?

I am attaching here some SEM pictures of structures etched in Si by DRIE. The process is far from being optimized, e.g., inadequate sidewall passivation, huge underetching of the mask. Aside from...

30 July 2023 9,348 0 View