Is it possible to pattern PMMA through EBL, on a Au-coated Quartz substrate?

Hi, Substrate- Au thin film (20-100nm) coated on Quartz. EHT- 10KV current- at least 0.2nA Resist- PMMA (150nm) + conductive polymer. To the best of my knowledge, EBL patterning would be...

11 November 2017 1,150 8 View