Adem Ozcelik

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Questions related from Adem Ozcelik

Which recipe to use for Si DRIE to get Si pillars of 5 - 10 micron diameter and 50 - 100 micron tall ?

This would be etching away a much larger area and leaving only pillars that are separated by 50 micron or larger distance. I tried once, but almost all of the pillars that were patterned with SPR...

17 December 2014 8,502 8 View

What is the best method of making PDMS micro pillars?

Making holes in the Si wafer via DRIE or holes in SU8 and using it as negative mold, and cure PDMS on it to get PDMS pillars? or Making pillars from SU8 or Si (DRIE) and making a negative mold...

17 December 2014 6,339 9 View