Why is the sheet resistance of AZO films deposited by RF magnetron sputtering is too high...greater than 10000 ohm/sq?

I have deposited AZO films of around 150nm using a target of ZnO-Al 98-2 wt% and 99.99% pure on glass substrate using RF sputtering. But the sheet resistance is very high as compared to other...

06 January 2022 5,536 6 View