Abdul Bhuiya

2 Questions 5 Answers 0 Followers

Questions related from Abdul Bhuiya

Has anyone tried using PMMA as a mask when etching SiO2?

I need to etch 50 nm of SiO2 with 150 nm of PMMA as the mask layer. As I used Freon 23 to etch it, it looks like it takes around 50 nm PMMA out with 50 nm SiO2. Is there any way that I can reduce...

02 March 2014 5,981 15 View

Does ITO coated Quartz substrate stick/bond to Polydimethylsiloxane (PDMS)?

I am fabricating a microfuidic channel in PDMS. I would like the channel to bond/stick with the ITO coated Quartz substrate that I have. Does PDMS stick to ITO coated Quartz substrate?

21 January 2013 2,497 5 View