1. ( low resistivity or high resistivity wafer )
2. ( P type or N type)
3. Criteria for selection of resistivity and type
4. What type of wafer is preferred for piezoelectric based sensor where silicon doesn't contribute anything except supporting material i.e. cantilever.
It all depends what you want to do with wafer.
If you using it simply as a passive subsstrate. Of course you would need SiO2 passivation on it. Thenany kind of resistivity , (n/p type should not matter.
Because you will be depositing a piezoelectric on top of SiO2 layer, and back etching Silicon to make a cantilever.
Criteria for selection of resistivity, p/n type etc., are seen more critically when you care making a device with silicon as on of the interfce, for exmaple making a p-n junction.
K. Sreenivas
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