Hello, I would like to consult about an issue with the vacuum system valve. We are currently using the Temescal BJD-1800 Bell Jar Deposition System, and the details of the procedure and the problem are as follows:
Cold Start-up Procedure
- Initially, the mechanical pump is used to reduce the pressure to 5.0 × 10^-3 Torr.
- After that, the cryo-pump is used to transition to a higher vacuum state.
Operation
- The mode is set from the control panel, and the system is started.
ProblemDuring this process, the high vacuum valve does not open.
- The valve is designed to be Normally Open, and it is supposed to close when air is injected during the startup process.
In such a case, what would be the best approach to resolve this issue? I would appreciate any advice on troubleshooting steps or potential causes of this problem.
1. Verify that you have proper gas pressure provided to the gate valve cylinder.
2. The signal from the pressure gauge is probably a relay that opens or closes when the pressure reaches your target pressure. Access the portion of the pressure sensor that does this, and use a multimeter to verify that something happens at your target pressure. If nothing changes, find the manual and dial in the target pressure. Make sure you know if this relay is switching 12 VDC, 24 VDC, 120 VAC, etc. so that you can set the multimeter correctly.
3. If the relay flips at the desired pressure, and you have gas provided to the gate valve, verify that the signal is making it from the pressure sensor to the gate valve.
If that's too much of a mess, email FerroTec. They acquired Temescal, and they should be able to offer some support for even these older systems.
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