please check this article. it may be helpful to you

http://doi.org/10.1155/2016/3153170

Thank you Oza Mahatta

Dear Afrah Bardaoui ,

the paper cited by Oza Mahatta is quite useful.

However, remember that each system behaves differently. There is a comprehensive discussion on the variation of each critical parameter. Nevertheless, each system needs a particular setup and optimum deposition conditions.

In my experience, substrate temperature and deposition atmosphere change the final results in an unprecedented way. Optimization of your system is essential. Use the information as your start point, take care of each vital parameter; otherwise, you never get the same material at each deposition cycle.

Use it as a reference along with the evaluation of your particular problem.

Best regards,

WNM