Hi everyone. Do you think is it possible to deposit a metal (e.g. Au or Pt) on Silicon nitride ( Si3N4 ) (by any electrochemical techniques or etc.)? What parameters do I need to consider? Thanks in advance.
Dear Hedyeh Tafreshi ,
Silicon nitride is an insulator. By definition, "an electrochemical deposition is a process by which a thin and tightly adherent desired coating of metal, oxide, or salt can be deposited onto the surface of a conductor substrate by simple electrolysis of a solution containing the desired metal ion or its chemical complex." [1] https://doi.org/10.1007/978-0-387-92897-5_700
Therefore depositing metals using electrochemical processes would not be a choice with your substrate (i.e. silicon nitride).
However, you could perform a surface pretreatment including : cleaning, etching and electroless plating.
Conventional metallization process for nonconductive materials largely depends on metal deposition by vacuum evaporation, sputtering, chemical vapor deposition, which are widely utilized in microelectronic industry today :
[2] P. Van Zant, Microchip Fabrication: A Practical Guide to Semiconductor Processing, 4th edition (McGraw-Hill Professional Publishing, New York, 2000).
[3] M. Datta, T. Osaka, and J. W. Schultze, Microelectronic packaging (CRC Press, Boca Raton, 2005)
Laser modification combined with electroless plating process could also be used :
[4] https://www.osapublishing.org/DirectPDFAccess/699A7C9A-9D3D-4CDA-B3AA1D16459F3030_142025/oe-15-20-12743.pdf?da=1&id=142025&seq=0&mobile=no
Best regards,
Marie B.
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